Fabrication of Y-Splitters and Mach–Zehnder Structures on (Yb,Nb):RbTiOPO<inline-formula><tex-math> ₄</tex-math></inline-formula>/RbTiOPO<inline-formula><tex-math> ₄</tex-math></inline-formula> Epitaxial Layers by Reactive Ion Etching | Publicación